Reply To: What process control monitor (PCM)? and why is it important?

#4151
Henrik
Guest

The PCM is important in several ways. It is a monitor for the manufacture. It is used to sort between good and pure wafers e.g. 3 out of 5 structures shall pass on the specified parameters. Monitoring the PCM data over time can predict potential issues.

The PCM structures can be placed in scribeline or as dies. It is important that the structures are spread over the wafer i.e. Edge, center, right,left, up and down.
Each fab and each technology has its preferred monitors.

The wafer customer does only see a selection of the PCM data.



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